Disciplines and Occupations

Microtechnology

Manufacturing technology for making microscopic devices in the micrometer range (typically 1-100 micrometers), such as integrated circuits or MEMS. The process usually involves replication and parallel fabrication of hundreds or millions of identical structures using various thin film deposition techniques and carried out in environmentally-controlled clean rooms.

National Library of MedicineMedical Subject Headings2026

Structured Summary

Abstract

Manufacturing technology for making microscopic devices in the micrometer range (typically 1-100 micrometers), such as integrated circuits or MEMS. The process usually involves replication and parallel fabrication of hundreds or millions of identical structures using various thin film deposition techniques and carried out in environmentally-controlled clean rooms.

MeSH Record

Classification

Broader headings

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MeSH Record

Synonyms

7 entry terms
  • Microfabrication
  • Micromachining
  • Micromanufacturing
  • Microfabrications
  • Micromachinings
  • Micromanufacturings
  • Microtechnologies

MeSH Record

Aspects Covered

4 allowable subheadings

Indexed with the subheadings instrumentation, methods, standards, statistics & numerical data.

MeSH Record

History Note

2009

MeSH Hierarchy

Tree Numbers

  1. H01w.570w
  2. J01.897w.520w.500w

MeSH Record

NLM Classification

QT 36.5

AMA Style

References

  1. National Library of Medicine. Microtechnology. Medical Subject Headings (MeSH). 2026. Unique ID D055616. http://id.nlm.nih.gov/mesh/2026/D055616
  2. Microtechnology. In: Wikipedia. https://en.wikipedia.org/wiki/Microtechnology
  3. Microtechnology. In: Wikidata. https://www.wikidata.org/wiki/Q1484779